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Semiconductor Applications/ Furnace Applications

Erodex produce a wide range of parts and tooling for the semi-conductor industries.
Materials such as fine-grained graphites, ultra purified graphites, graphite foil, pure tungsten, silicon carbide and vitreous and pyrolytic graphites are machined for the following applications.

Heaters

Crucibles

Gaskets

Silicon Carbide (SiC) wafer carriers

SiC dummy wafers

Susceptors

LTO Injector Tubes

Glass to metal sealing jigs

Ion Implantation Equipment parts in tungsten and graphite

Furnace Applications

For many furnace and other high temperature applications, Erodex can offer parts made from extruded graphite. Although slightly lower in strength than ISO Graphite, Extruded Grades are nonetheless ideally suited for many applications including furnace heating elements, fixtures and furniture, susceptors, moulds, crucibles and sintering trays & boats. Extruded graphite is also widely used as a cathode or anode material in a wide variety of electrolytic cell applications.


Please click here to request a copy of our Semi Conductor and
Furnace Applications literature.
Or send details of your requirements with our general enquiry form.

Tel: 01384 892011 Fax: 01384 897162 Email: sales@erodex.com