Semiconductor Applications

Erodex produce a wide range of parts and tooling for the semiconductor industries. Materials such as fine-grained graphites, ultra purified graphites, graphite foil, pure tungsten, silicon carbide and vitreous and pyrolytic graphites are machined for the following applications.

• Heaters
• Crucibles
• Gaskets
• Silicon Carbide (SiC) wafer carriers
• SiC dummy wafers
• Susceptors
• LTO Injector Tubes
• Glass to metal sealing jigs
• Ion Implantation Equipment parts in tungsten and graphite