Erodex produce a wide range of parts and tooling for the semiconductor industries. Materials such as fine-grained graphites, ultra purified graphites, graphite foil, pure tungsten, silicon carbide and vitreous and pyrolytic graphites are machined for the following applications.
- Silicon Carbide (SiC) wafer carriers
- SiC dummy wafers
- LTO Injector Tubes
- Glass to metal sealing jigs
- Ion Implantation Equipment parts in tungsten and graphite
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